FAILURE ANALYZER WITH SOLID IMMERSION LENS EMBEDDED ANALYSIS PLATE

PURPOSE: A failure analyzer is provided to control freely an analysis range and to load stably a sample on a stage by using a solid immersion lens embedded analysis plate. CONSTITUTION: A failure analyzer includes an analysis plate and a failure detecting unit. The analysis plate(2) includes a first...

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Bibliographic Details
Main Authors KOYAMA TOHRU, KOMORI JUNKO
Format Patent
LanguageEnglish
Korean
Published 04.11.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PURPOSE: A failure analyzer is provided to control freely an analysis range and to load stably a sample on a stage by using a solid immersion lens embedded analysis plate. CONSTITUTION: A failure analyzer includes an analysis plate and a failure detecting unit. The analysis plate(2) includes a first main surface for loading a sample(1) and a second main surface. The failure detecting unit(20) includes an optical system(21a) for detecting failures of the sample. A concavity is formed on the second main surface of the analysis plate. A convexity(2d) is formed at a bottom of the concavity. The convexity functions as a solid immersion lens. The failure detecting unit transmits/receives light to/from the convexity.
Bibliography:Application Number: KR20040028315