BAKE SYSTEM HAVING COOLING APPARATUS USING HEAT PIPE TO HEAT AND COOL UNIFORMLY ENTIRE REGION OF BAKE PLATE

PURPOSE: A bake system having a cooling apparatus using a heat pipe is provided to heat and cool uniformly an entire region of a bake plate and reduce a cooling period by using a heat pipe. CONSTITUTION: A bake system includes a plate, a heater for heating the plate, and a cooling apparatus for cool...

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Bibliographic Details
Main Authors LEE, JIN SEONG, KIM, SANG GAP, SHIN, DONG HWA, KIM, TAE GYU, LEE, DONG U
Format Patent
LanguageEnglish
Korean
Published 21.09.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A bake system having a cooling apparatus using a heat pipe is provided to heat and cool uniformly an entire region of a bake plate and reduce a cooling period by using a heat pipe. CONSTITUTION: A bake system includes a plate, a heater for heating the plate, and a cooling apparatus for cooling the plate. The cooling unit includes a cooler, a refrigerant tank, and a temperature maintenance part. The cooler is installed at an opposite side of the plate(150) in order to cool the plate. A heater(152) is installed between the cooler and the plate. The refrigerant tank(160) is used for supplying the refrigerant to the cooler in a cooling process and storing the refrigerant in a heating process. The temperature maintenance part maintains constantly the temperature of the refrigerant in the cooling process.
Bibliography:Application Number: KR20030016018