STRUCTURE OF TEFLON GUIDE OF CASSETTE STAGE FOR NORMAL PROCESS

PURPOSE: A structure of a Teflon guide of a cassette stage is provided to perform stably a normal process though a cassette carrier is abnormally loaded on the Teflon guide of the cassette stage. CONSTITUTION: A storage region(36) is formed in an inside of a Teflon guide(30). An elastic spring(34) a...

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Bibliographic Details
Main Authors BAEK, UN CHAN, BAEK, SEUNG CHANG, CHOI, SEONG JU
Format Patent
LanguageEnglish
Korean
Published 20.09.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A structure of a Teflon guide of a cassette stage is provided to perform stably a normal process though a cassette carrier is abnormally loaded on the Teflon guide of the cassette stage. CONSTITUTION: A storage region(36) is formed in an inside of a Teflon guide(30). An elastic spring(34) and a guide movement part(32) are installed in the storage region. A plurality of stoppers(38,42) are formed at an upper part and a lower part of the storage region. A carrier rack(14) is loaded on a kicker sensor(18) of the Teflon guide. A position of the guide movement part returns to an original position when the carrier lack is loaded on a slope side(40) of the guide movement part.
Bibliography:Application Number: KR20030015772