WAFER TRANSPORT APPARATUS TO PREVENT THE COLLISION OF WAFERS

PURPOSE: A wafer transport apparatus is provided to prevent the collision of wafers by sensing previously normal loading state of the wafer using a sensor. CONSTITUTION: A wafer transport apparatus includes a fork(120) for supporting a wafer, a driving part(110) for transporting the wafer, and a pai...

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Bibliographic Details
Main Author LEE, SEON U
Format Patent
LanguageEnglish
Korean
Published 16.09.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A wafer transport apparatus is provided to prevent the collision of wafers by sensing previously normal loading state of the wafer using a sensor. CONSTITUTION: A wafer transport apparatus includes a fork(120) for supporting a wafer, a driving part(110) for transporting the wafer, and a pair of sensors. The first sensor(130) is located at one end of the driving part for sensing a normal loading state of the wafer. The second sensor(140) is located at one end of the fork for sensing an abnormal loading state of the wafer.
Bibliography:Application Number: KR20030014825