INSPECTION APPARATUS FOR INSPECTING GLASS SUBSTRATE OF FLAT PANEL DISPLAY

PURPOSE: An inspection apparatus for inspecting a glass substrate of a flat panel display is provided to perform a macro inspection for the glass substrate of the flat panel display such as a semiconductor wafer, an LCD, a plasma display panel. CONSTITUTION: An inspection apparatus includes a stage(...

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Bibliographic Details
Main Authors NAGAMI OSAMU, ITO KAZUYA, FUJISAKI NOBUO
Format Patent
LanguageEnglish
Korean
Published 19.08.2004
Edition7
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:PURPOSE: An inspection apparatus for inspecting a glass substrate of a flat panel display is provided to perform a macro inspection for the glass substrate of the flat panel display such as a semiconductor wafer, an LCD, a plasma display panel. CONSTITUTION: An inspection apparatus includes a stage(7) for loading a target, an objective optic system for forming an image of the target, an image forming lens(30) for determining the image of the target, and a horizontal extension barrel(4,6) having a relay optic system(32-36,40,42,46-48,55,56). The inspection apparatus further includes a vertical extension barrel(45) and an observation optic system(50). The vertical extension barrel is connected to the horizontal extension barrel in order to transmit the determined image. The observation optic system includes an eyepiece(49).
Bibliography:Application Number: KR20040007609