SCATTER-PREVENTING LAYER WHICH PREVENTS THE SCATTERING OF LIGHT DURING THE OPTICAL MEASUREMENT FOR POLISHING PAD WINDOW FORMED ON LOWER SURFACE OF WINDOW

• Main Author: ROBERTS JOHN V. H
• Format: Patent
• Language: English; Korean
• Published: 09.08.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TOOLS FOR GRINDING, BUFFING, OR SHARPENING; TRANSPORTING

PURPOSE: A scatter-preventing layer for a polishing pad window is provided to suppress the scattering of lights during an optical measurement and to increase the signal intensity by suppressing the scattering of lights. CONSTITUTION: A window(30) includes a scatter-preventing layer(50) formed on a lower end surface(34). The scatter-preventing layer has an upper end surface(52) on the interface of the lower end surface and a lower end surface on the opposite side of the upper end surface. The scatter-preventing layer has an index of refraction similar to that of the window. The scatter-preventing layer reduces the loss of light on a rough surface(40) of the lower end surface of the window.