SCATTER-PREVENTING LAYER WHICH PREVENTS THE SCATTERING OF LIGHT DURING THE OPTICAL MEASUREMENT FOR POLISHING PAD WINDOW FORMED ON LOWER SURFACE OF WINDOW

PURPOSE: A scatter-preventing layer for a polishing pad window is provided to suppress the scattering of lights during an optical measurement and to increase the signal intensity by suppressing the scattering of lights. CONSTITUTION: A window(30) includes a scatter-preventing layer(50) formed on a l...

Full description

Saved in:
Bibliographic Details
Main Author ROBERTS JOHN V. H
Format Patent
LanguageEnglish
Korean
Published 09.08.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TOOLS FOR GRINDING, BUFFING, OR SHARPENING
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:PURPOSE: A scatter-preventing layer for a polishing pad window is provided to suppress the scattering of lights during an optical measurement and to increase the signal intensity by suppressing the scattering of lights. CONSTITUTION: A window(30) includes a scatter-preventing layer(50) formed on a lower end surface(34). The scatter-preventing layer has an upper end surface(52) on the interface of the lower end surface and a lower end surface on the opposite side of the upper end surface. The scatter-preventing layer has an index of refraction similar to that of the window. The scatter-preventing layer reduces the loss of light on a rough surface(40) of the lower end surface of the window.
Bibliography:Application Number: KR20040007019