PAD COATING SYSTEM AND INTERLOCKING METHOD THEREOF
PURPOSE: A pad coating system and an interlocking method thereof are provided to prevent previously an accident by stopping a pad coating operation according to each state of switches of a UV source part and a dispenser part. CONSTITUTION: A pad coating system includes a UV source part, a dispenser...
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Main Authors | , , |
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Format | Patent |
Language | English Korean |
Published |
23.07.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: A pad coating system and an interlocking method thereof are provided to prevent previously an accident by stopping a pad coating operation according to each state of switches of a UV source part and a dispenser part. CONSTITUTION: A pad coating system includes a UV source part, a dispenser part, and a prober part. The UV source part(42) includes a plurality of first control switches to set up UV irradiation conditions in response to UV source open/close signals, irradiate the UV irradiation conditions, and output the first signals for indicating each state of the first switches. The dispenser part(44) includes a plurality of second control switches to set up coating conditions in response to coating condition assignment signals, scan a coating solution according to the coating conditions, and output the second signals for indicating each state of the second switches. The prober part(30) generates the UV source open/close signals and the coating condition assignment signals, controls a pad coating operation, and stops the pad coating operation in response to the first and the second signals. |
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Bibliography: | Application Number: KR20030003091 |