PROGRAMMABLE PATTERNING MEANS AND LITHOGRAPHIC PROJECTION APPARATUS USING THE SAME
PURPOSE: Provided are a programmable patterning unit with controlled an image and a lithographic projection apparatus using the unit possible to simultaneously carry out phase modulation and amplitude modulation. CONSTITUTION: The lithographic projection apparatus comprises a radiation system(Ex,IL,...
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Main Author | |
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Format | Patent |
Language | English Korean |
Published |
05.06.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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