PROBE SHEET, PROBE CARD, SEMICONDUCTOR TEST EQUIPMENT AND SEMICONDUCTOR DEVICE FABRICATION METHOD, CONCERNED WITH TESTING SIMULTANEOUSLY PLURAL SEMICONDUCTOR DEVICES

PURPOSE: A Probe sheet, a probe card, semiconductor test equipment and a semiconductor device fabrication method are provided to test simultaneously plural semiconductor devices having an electrode structure of a narrow pitch. CONSTITUTION: A probe sheet includes a contact terminal, a wire, and an e...

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Bibliographic Details
Main Authors HASEBE AKIO, HASEBE TAKEHIKO, KASUKABE SUSUMU, NARIZUKA YASUNORI
Format Patent
LanguageEnglish
Korean
Published 14.04.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PURPOSE: A Probe sheet, a probe card, semiconductor test equipment and a semiconductor device fabrication method are provided to test simultaneously plural semiconductor devices having an electrode structure of a narrow pitch. CONSTITUTION: A probe sheet includes a contact terminal, a wire, and an electrode pad. The contact terminal is in contact with an electrode(3) installed on a wafer(1). A wire is drawn from the contact terminal. The electrode pad is electrically connected to the wire. A pitch of the electrode pads is wider than a pitch of the contact terminals. The contact terminals are arranged according to an array of peripheral electrodes of the semiconductor devices formed on the wafer. The electrode pads are arranged in a grid pattern.
Bibliography:Application Number: KR20030068119