BOARD HOLDING DEVICE AND BOARD PROCESSING DEVICE

PURPOSE: To provide a board holding device and a board processing device that can suppress adhesion of particles to a board. CONSTITUTION: A fixing base 34 provided with suction piping 342 and supply piping 343 is provided in a board holding part 33, and a holding member 35 provided with a flow rout...

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Bibliographic Details
Main Author NAKAZAWA YOSHIYUKI
Format Patent
LanguageEnglish
Korean
Published 18.03.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: To provide a board holding device and a board processing device that can suppress adhesion of particles to a board. CONSTITUTION: A fixing base 34 provided with suction piping 342 and supply piping 343 is provided in a board holding part 33, and a holding member 35 provided with a flow route 350 of an atmosphere to suck and hold a board 90 is placed on the fixing base 34. The suction piping 342 is connected with a compressor through piping 345, and the supply piping 343 is connected with a gas supply part 348 through piping 346 and a solenoid valve 347. When the board holding part 33 holds the board 90, the holding member 35 sucks the board 90 by sucking the atmosphere through the suction piping 342 by means of the compressor, and when the board holding part 33 releases the board 90, the suction of the suction piping 342 is still continued and the solenoid valve 347 is opened to supply a gas from the gas supply part 348, and the gas is supplied through the supply piping 343.
Bibliography:Application Number: KR20030062031