METHOD AND CATALYST FOR DECOMPOSING PERFLUOROCOMPOUND AND APPARATUS FOR TREATING PERFLUOROCOMPOUND

PURPOSE: To enhance the activity when a perfluorocompound such as CF4 and C2F6 containing only fluorine as halogen is decomposed at low temperature. CONSTITUTION: The fluorine in the perfluorocompound containing only fluorine as halogen is converted into hydrogen fluoride by bringing the perfluoroco...

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Bibliographic Details
Main Authors KAWASAKI TERUFUMI, YAMASHITA HISAO, KANNO SHUICHI, TAMATA SHIN, ICHIKAWA SHINICHI
Format Patent
LanguageEnglish
Korean
Published 06.03.2004
Edition7
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Summary:PURPOSE: To enhance the activity when a perfluorocompound such as CF4 and C2F6 containing only fluorine as halogen is decomposed at low temperature. CONSTITUTION: The fluorine in the perfluorocompound containing only fluorine as halogen is converted into hydrogen fluoride by bringing the perfluorocompound into contact with a catalyst containing Al, Ni and W as active components, the multiple oxide of Ni and Al and that of W and Ni at 500-800°C in the presence of steam or steam and oxygen. By using this catalyst, the low-temperature decomposition activity can be enhanced, namely, the perfluorocompound can be decomposed at a low temperature at a high decomposition rate.
Bibliography:Application Number: KR20030059392