METHOD AND CATALYST FOR DECOMPOSING PERFLUOROCOMPOUND AND APPARATUS FOR TREATING PERFLUOROCOMPOUND
PURPOSE: To enhance the activity when a perfluorocompound such as CF4 and C2F6 containing only fluorine as halogen is decomposed at low temperature. CONSTITUTION: The fluorine in the perfluorocompound containing only fluorine as halogen is converted into hydrogen fluoride by bringing the perfluoroco...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
06.03.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: To enhance the activity when a perfluorocompound such as CF4 and C2F6 containing only fluorine as halogen is decomposed at low temperature. CONSTITUTION: The fluorine in the perfluorocompound containing only fluorine as halogen is converted into hydrogen fluoride by bringing the perfluorocompound into contact with a catalyst containing Al, Ni and W as active components, the multiple oxide of Ni and Al and that of W and Ni at 500-800°C in the presence of steam or steam and oxygen. By using this catalyst, the low-temperature decomposition activity can be enhanced, namely, the perfluorocompound can be decomposed at a low temperature at a high decomposition rate. |
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Bibliography: | Application Number: KR20030059392 |