METHOD FOR MANUFACTURING FILM BULK ACOUSTIC RESONATOR FILTERS

PURPOSE: A method for manufacturing an FBAR(Film Bulk Acoustic Resonator) filter is provided to simplify the process and to miniaturize the size of the FBAR. CONSTITUTION: An FBAR filter(10) includes a plurality of film bulk acoustic resonators(38a-38e) having top electrodes(36). The FBARs(38c,38a)...

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Main Authors GINSBURG EYAL, RAO VALLURI, BAR SADEH EYAL, MA QING, TRAN QUAN, WANG LI PENG, HECK JOHN, TALALYEVSKY ALEXANDER
Format Patent
LanguageEnglish
Korean
Published 14.02.2004
Edition7
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:PURPOSE: A method for manufacturing an FBAR(Film Bulk Acoustic Resonator) filter is provided to simplify the process and to miniaturize the size of the FBAR. CONSTITUTION: An FBAR filter(10) includes a plurality of film bulk acoustic resonators(38a-38e) having top electrodes(36). The FBARs(38c,38a) are shunt FBARs while the FBAR(38b) is a series FBAR coupled to the FBAR(38a) via an extension(36f) of the upper electrodes(36b,36e). An intermediate layer(35) in each FBAR includes a piezoelectric film. The same layer of piezoelectric film is positioned underneath each of the upper electrodes of the FBARs. Also, the intermediate layer(35) includes an interlayer dielectric that fills the area between FBARs while the region under each upper electrode is a piezoelectric film.
Bibliography:Application Number: KR20030046724