WAFER TRANSFER APPARATUS

PURPOSE: A wafer transfer apparatus is provided to be capable of horizontally controlling a handler by using a level control part. CONSTITUTION: A wafer transfer apparatus(100) is provided with a base(110) capable of being driven by a rotating shaft, a robot arm part(120) capable of rotationally and...

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Bibliographic Details
Main Author KIM, HYEONG YONG
Format Patent
LanguageEnglish
Korean
Published 04.10.2003
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A wafer transfer apparatus is provided to be capable of horizontally controlling a handler by using a level control part. CONSTITUTION: A wafer transfer apparatus(100) is provided with a base(110) capable of being driven by a rotating shaft, a robot arm part(120) capable of rotationally and linearly moving, fixed at the upper portion of the base for transferring a wafer, a handler(130) installed at the front portion of the robot arm part for fixedly loading the wafer, and a level control part(140) installed at the predetermined portion fixed with the base and the robot arm part. Preferably, the level control part includes four fastening bolts(142) and a tension washer inserted at each fastening bolt, thereby controlling the level of the apparatus by controlling the fastening extent of the fastening bolt. 본 발명은 웨이퍼를 이송시키는 핸들러의 균형을 얼라인먼트(alignment)할 수 있는 웨이퍼 이송 장치에 관한 것으로, 웨이퍼를 이송시키기 위한 장치는 베이스와 로봇 아암부의 고정부분에 좌,우 수평조절을 위한 수단을 갖는다. 이 좌,우 수평조절 수단은 4개의 조임 볼트와, 각각의 상기 조임 볼트에 끼워지는 텐션 와셔로 이루어진다.
Bibliography:Application Number: KR20020016707