Coating compositions for use with an overcoated photoresist

• Main Authors: WAYTON GERALD B, COLEY SUZANNE, TREFONAS III. PETER
• Format: Patent
• Language: English; Korean
• Published: 25.06.2003
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; AUXILIARY PROCESSES IN PHOTOGRAPHY; BASIC ELECTRIC ELEMENTS; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR,STEREO-PHOTOGRAPHIC PROCESSES; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHYSICS; SEMICONDUCTOR DEVICES; THEIR PREPARATION OR CHEMICAL WORKING-UP; TRANSPORTING

PURPOSE: Provided is a coating composition comprising a polyester resin component to prevent spin-on reflection which can be used with an overcoated photoresist to prepare a direct circuit board. CONSTITUTION: The coating composition includes an anti-reflection composition containing a polyester resin and a photoresist layer on the anti-reflection composition. The polyester resin includes an aromatic group as a pendant group or as a backbone unit. The aromatic group is, for example, a carbocyclic aryl group, such as substituted or non-substituted phenyl, substituted or non-substituted naphtyl or substituted or non-substituted anthracene. The anti-reflection composition includes a substance having a substituted or non-substituted aryl dicarboxylate group, a substituted or non-substituted carbocyclic aryl dicarboxylate group, substituted or non-substituted phenyl dicarboxylate group, or substituted or non-substituted phenyl dicarboxylate group. 제 1 측면으로, 폴리에스테르 수지 성분을 함유하는 유기 코팅 조성물, 특히 스핀 상태의(spin-on) 반사방지 코팅 조성물이 제공된다. 다른 측면으로, 다중 하이드록시 화합물을 중합하여 수득된 수지 성분을 함유하는 코팅 조성물이 제공된다. 본 발명의 코팅 조성물은 직접회로판을 제조하기 위해 오버코팅된 포토레지스트 층과 함께 특히 유용하게 사용된다.