Lithographic Apparatus and Device Manufacturing Method

PURPOSE: A lithographic projection apparatus is provided to substantially reduce the problem caused by a gas discharge of a material used in a conduit inside a vacuum chamber. CONSTITUTION: The conduit(C2,C3) supplies utilities to a movable component in the vacuum chamber such as an object table(W2T...

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Main Authors JACOBS HERNES, VAN DER SCHOOT HARMEN KLAAS, HOL SVEN ANTOIN JOHAN, CALLAN DAVID, VOSTERS PIET, VAN DIESEN ROBERT JOHANNES PETRUS
Format Patent
LanguageEnglish
Korean
Published 09.06.2003
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A lithographic projection apparatus is provided to substantially reduce the problem caused by a gas discharge of a material used in a conduit inside a vacuum chamber. CONSTITUTION: The conduit(C2,C3) supplies utilities to a movable component in the vacuum chamber such as an object table(W2T,W3T), associated motor or sensor. The conduit includes flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least the first degree of freedom. 모터나 센서에 연계된 대물테이블과 같은, 진공챔버내의 가동 구성요소에 유틸리티를 제공하는 도관을 가진 리소그래피 투영장치. 상기 도관은 진공챔버내 진공으로 인한 도관의 가스방출을 방지하면서 적어도 제1의 자유도로 상기 가동 구성요소의 운동을 허용하는 플렉시블 금속 벨로우즈를 포함한다.
Bibliography:Application Number: KR20020074315