Lithographic Apparatus and Motor for use in said Apparatus

• Main Authors: DEKLERK ANGELO CESAR PETER, VANDERSCHOOT HARMEN KLASS, HOL SVEN ANTOIN JOHAN, VANEIJK JAN
• Format: Patent
• Language: English; Korean
• Published: 03.03.2003
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GENERATION; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PURPOSE: Provided is a lithographic projection apparatus with an actuator having a back iron of reduced mass but no loss of performance of the actuator. CONSTITUTION: Each of magnet sub-assemblies is arranged such that the component magnets are adjacent to one another in the first direction, as defined above. In this arrangement, a subsidiary magnet is located on either side of each of the main magnets. The first main magnet(2) of the first magnet sub-assembly(1) is located between the first subsidiary magnet(5) and the third subsidiary magnet(4) of the first magnet sub-assembly. Similarly, the second main magnet(7) of the first magnet sub-assembly(1) is located between the second subsidiary magnet(4) and the third subsidiary magnet(3). The second magnet sub-assembly is arranged in a similar fashion such that, in the complete magnet assembly, the corresponding magnets in the two sub-assemblies(1,11) are facing each other. 장치의 제1부분에 부착되어 제1자기장을 제공하는 주자석시스템과; 상기 제1부분에 부착되고 Halbach 구성으로 배치되어 제2자기장을 제공하는 보조자석시스템과; 상기 장치의 제2부분에 부착되고, 전기도전성 요소가 지니는 전류와 상기 제1 및 제2자기장의 조합의 상호작용에 의하여 장치의 상기 제1부분과 제2부분의 사이에 힘을 생성하도록 배치되는 상기 전기도전성 요소를 포함하여 이루어진, 장치의 제1부분과 제2부분의 사이에 힘을 생성하는 로렌츠액추에이터.