DEVICE FOR MONITERING OFFSET OF DC MOTOR IN WAFER HANDLER

PURPOSE: An apparatus for monitoring a DC motor offset of a wafer handler is provided to prevent the scrap of wafer during a process of ion implantation by monitoring the status of a zero offset to drive a motor by being identified by a user. CONSTITUTION: An apparatus for monitoring a DC motor offs...

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Bibliographic Details
Main Author KIM, HYEONG YONG
Format Patent
LanguageEnglish
Korean
Published 15.01.2003
Edition7
Subjects
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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Summary:PURPOSE: An apparatus for monitoring a DC motor offset of a wafer handler is provided to prevent the scrap of wafer during a process of ion implantation by monitoring the status of a zero offset to drive a motor by being identified by a user. CONSTITUTION: An apparatus for monitoring a DC motor offset of a wafer handler includes a motion control board(10) installed in a wafer handler controller(100) for driving the servo motor by outputting a servo analog output voltage, a first analog/digital(A/D) converter(18) for converting the servo analog output voltage outputted from a pair of terminals of the motion control board(10) into a digital signal and a first liquid crystal display(LCD) driving block(22) for displaying the servo analog output voltage to a first display block(26) by receiving the servo analog output voltage converted into the digital signal by the first A/D converter(18). 본 발명은 웨이퍼 핸들러에서 웨이퍼를 로딩 또는 언로딩할 시 DC모터의 오프셋(OFFSET) 상태를 표시하여 모니터링하는 웨이퍼 핸들러의 오프셋 모니터링장치에 관한 것이다. 이를 위해 웨이퍼 핸들러 콘트롤러의 모션콘트롤보드와 PWM증폭기로부터 출력되는 서보아날로그 전압과 암모터 입력전압을 LCD 표시장치에 표시하여 작업자가 확인하도록 하여 모터구동을 위한 제로오프셋 상태를 모니터링하여 이온주입공정에서 웨이퍼의 스크랩을 방지하도록 한다.
Bibliography:Application Number: KR20010039949