MASTER CARRIER FOR MAGNETIC TRANSFER

PURPOSE: A master carrier for transferring magnetism is provided to increase the adhesive force of a soft magnetic layer formed on a pattern surface of a substrate, prevent the soft magnetic layer from being fell off, and accordingly improve durability and suppress transfer defectives. CONSTITUTION:...

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Bibliographic Details
Main Authors NISHIKAWA MASAKAZU, YASUNAGA TADASHI
Format Patent
LanguageEnglish
Korean
Published 06.01.2003
Edition7
Subjects
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Summary:PURPOSE: A master carrier for transferring magnetism is provided to increase the adhesive force of a soft magnetic layer formed on a pattern surface of a substrate, prevent the soft magnetic layer from being fell off, and accordingly improve durability and suppress transfer defectives. CONSTITUTION: A master carrier(3) for transferring magnetism is equipped with a soft magnetic layer(32) formed on a land/groove pattern formed on a substrate(31). The adhesive force between the substrate and the magnetic layer is 1.0 x 109N/m2 or greater. An oxygen concentration(Do) for the surface of the magnetic layer formed on the land is gradually reduced toward the direction of the depth of the substrate and is greater than an oxygen concentration(Dh) at the magnetic layer formed on the groove. (과제)마스터담체와 슬레이브매체를 밀착시켜 전사용 자계를 인가하여 자기전사를 행할 때의, 마스터담체에 있어서의 기판의 패턴표면에 형성한 연자성층의 부착력을 증대하여, 이 연자성층의 탈락을 방지하여, 내구성의 향상 및 전사불량을 억제한다. (해결수단)마스터담체(3)는 기판(31)에 형성한 패턴상에 연자성층(32)을 구비하고, 기판(31)과 기판(32)의 부착력이 1×10N/㎡이상인 동시에, 기판(31)의 표면에 산화처리를 실시하여, 연자성층측 표면에서의 산소농도(Do)가 표면으로부터의 거리가 커짐에 따라서 적어지고, 패턴형성 깊이부위에서의 산소농도(Dh)에 대하여, Do>Dh의 관계에 있다.
Bibliography:Application Number: KR20020035254