ELEVATOR PLATFORM OF SEMICONDUCTOR FABRICATION EQUIPMENT

PURPOSE: An elevator platform of semiconductor fabrication equipment is provided to prevent a contacting phenomenon between a wafer with a wafer cassette by moving the elevator platform to a left or a right direction. CONSTITUTION: A shaft(24) is used for lifting up or lifting down a wafer cassette....

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Bibliographic Details
Main Author JUNG, TAE YEONG
Format Patent
LanguageEnglish
Korean
Published 31.12.2002
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: An elevator platform of semiconductor fabrication equipment is provided to prevent a contacting phenomenon between a wafer with a wafer cassette by moving the elevator platform to a left or a right direction. CONSTITUTION: A shaft(24) is used for lifting up or lifting down a wafer cassette. The shaft(24) is inserted into a platform fixing portion(22). The platform fixing portion(22) is fixed by the third and the fourth screws(34,36). A hole(26) is formed at a center portion of an elevator platform(20). The shaft fixing portion(22) is inserted into the hole(26) of the elevator platform(20) in order to load the wafer cassette. The first and the second screws(30,32) are inserted into a lower side of the elevator platform(20) in order to fix the elevator platform(20) and the shaft fixing portion(22) and move the elevator platform(20) within a gap of the center hole(26).
Bibliography:Application Number: KR20010034985