Substrate processing device

• Main Authors: INOUE KOUICHI, HOSHI TATSUYA, SUGANAGA DAISUKE, KONDO TOMOKI
• Format: Patent
• Language: English; Korean
• Published: 16.12.2002
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FREQUENCY-CHANGING; HOLOGRAPHY; MATERIALS THEREFOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PURPOSE: A substrate processing device is provided to prevent the reverse surface of a substrate from being stained due to local corrosion when the substrate which corrodes with liquid chemicals such as etchant and peeling liquid is used. CONSTITUTION: A tank(37) is located at the entrance part of a liquid chemical processing part, and arranged below a conveyance line for a substrate(100). The liquid chemicals are made to overflow to contact with the reverse surface of the substrate to the overall width. When the reverse surface of the substrate becomes temporarily and uniformly wet due to the contact with the liquid chemicals, the substrate is not stained on condition that the reverse surface does not become dry even if the liquid chemicals stick locally on the reverse surface of the substrate as long as the liquid chemicals flow around or a conveyance roller contacts. 에칭액이나 박리액 등의 약액에 의해 침식을 받는 기판을 사용한 경우에, 그 기판의 이면에 국부 침식에 의해 얼룩이 발생하는 것을 방지한다. 약액 처리부의 입구 부분에 깊은 통(37)을 설치한다. 깊은 통(37)은 기판(100)의 반송 라인보다 하방에 배치되어, 약액을 오버플로시켜 기판(100)의 이면 전체폭에 접촉시킨다. 이 약액과의 접촉에 의해 일단 기판(100)의 이면이 균일하게 젖으면, 그 이면이 건조하지 않는 한, 약액 반입이나 반송 롤러의 접촉에 의해 약액이 기판(100)의 이면에 국부적으로 부착하더라도 얼룩은 발생하지 않는다.