Porous materials
PURPOSE: A porous dielectric material, its preparation method, an integrated circuit containing the porous dielectric material and an electronic device containing the porous dielectric layer are provided, wherein dielectric material is useful for manufacturing an electronic device. CONSTITUTION: The...
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Main Authors | , , , |
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Format | Patent |
Language | English Korean |
Published |
30.11.2002
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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