Polymer synthesis and films therefrom
PURPOSE: Provided are a method for synthesizing a polymer suitable for use as porogen to form porous material, particularly porous dielectric material, and a film produced by the same. CONSTITUTION: The method of preparing a plurality of cross-linked solution polymer particles comprises the steps of...
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Main Authors | , , |
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Format | Patent |
Language | English Korean |
Published |
09.10.2002
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: Provided are a method for synthesizing a polymer suitable for use as porogen to form porous material, particularly porous dielectric material, and a film produced by the same. CONSTITUTION: The method of preparing a plurality of cross-linked solution polymer particles comprises the steps of: (a) providing a monomer feed comprising one or more monomers, and one or more cross-linking agents; (b) providing a polymerization initiator feed comprising a polymerization initiator; (c) providing a reaction vessel containing one or more reaction solvents; (d) heating the one or more reaction solvents to a temperature sufficient to activate the polymerization initiator; and (e) adding the initiator feed and the monomer feed to the reaction vessel at a rate such that the concentration of the one or more monomers in the one or more reaction solvents is substantially constant.
단계적 방식(step-wise)에 의한 용액 중합으로 가교결합된 중합체가 제조된다. 이러한 가교결합 중합체는 전자 디바이스 제조에 유용한 다공성 유전체 물질을 제조하는데 적합하다. |
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Bibliography: | Application Number: KR20020016007 |