METHOD FOR FABRICATING MICRO LENS

PURPOSE: A method for fabricating a micro lens is provided, which has a cross section in a shape of a hyperhemisphere. CONSTITUTION: According to the method, a sacrificial layer(20a) is formed on a silicon or glass substrate(10), and an epilayer pattern whose cross section is deformed into a sphere...

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Bibliographic Details
Main Authors HAN, CHEOL HUI, LEE, CHUN SEOP
Format Patent
LanguageEnglish
Korean
Published 18.09.2002
Edition7
Subjects
AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR
SHAPING OR JOINING OF PLASTICS
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Summary:PURPOSE: A method for fabricating a micro lens is provided, which has a cross section in a shape of a hyperhemisphere. CONSTITUTION: According to the method, a sacrificial layer(20a) is formed on a silicon or glass substrate(10), and an epilayer pattern whose cross section is deformed into a sphere shape by a surface tension according to the heating is formed on the above sacrificial layer. And the sacrificial layer is laterally etched using the epilayer pattern. And the epilayer pattern is reflowed by heating the epilayer pattern. And at least a part of the cross section of the micro lens is in a hyperhemisphere shape.
Bibliography:Application Number: KR20010012605