TRANSPORT APPARATUS AND VACUUM PROCESSING SYSTEM USING THE SAME

• Main Authors: YUYAMA JUNPEI, MINAMI HIROFUMI
• Format: Patent
• Language: English; Korean
• Published: 03.05.2002
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PURPOSE: A transport apparatus is provided to have a simple configuration that involves a small turning radius and provides a high transport speed. CONSTITUTION: The transport apparatus(2) has first and second drive shafts(11,12) which are arranged coaxially. Independent first and second driving sources(M1,M2) transmit rotary forces in the clockwise and counterclockwise directions to these drive shafts(11,12), respectively, to rotate the first and second drive shafts(11,12). A first arm(21) is fixed to the first drive shaft(11), while a second arm(22) is fixed to the second drive shaft(12). At the ends of the first and second arms(21,22), third and fourth arms(23,24) are mounted with bearings, for example, so that they can smoothly rotate around spindles(23a,24a), respectively. The ends of these third and fourth arms(23,24) are connected to an articulating mechanism(3). All the first to fourth arms(21-24) have the same length(distance between rotation axes). 과제: 간소한 구성으로 선회반경을 작게 할 수 있으며, 게다가 반송속도가 큰 반송장치를 제공한다. 해결수단: 본 발명의 반송장치는, 일단부에 제 1 및 제 2 회전구동축을 가지며, 이 회전구동축이 동심상에 배치된 제 1 및 제 2 아암과, 제 1 및 제 2 아암의 타단부에 그 일단부가 회전가능하게 연결되는 제 3 및 제 4 아암을 갖는다. 제 3 및 제 4 아암의 타단부에 설치된 지지축을 동심상으로 배치하는 동시에, 이 지지축에 대하여 상호 반대위상의 회전동력을 부여하도록 구성된 자세제어기구를 갖는 관절기구부를 구비하고 있다.