SYSTEM AND METHOD FOR COLLECTING GAS
PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
07.07.2001
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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