SYSTEM AND METHOD FOR COLLECTING GAS

PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by...

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Bibliographic Details
Main Authors OIWA DOKUHISA, HAYASAKA NOBUO, OUCHI JUNKO, SAKAI ITSUKO, OKUMURA KATSUYA
Format Patent
LanguageEnglish
Korean
Published 07.07.2001
Edition7
Subjects
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Summary:PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by which efficient collection can be conducted and it is packed into a temporarily stored PFC cylinder.
Bibliography:Application Number: KR20000081101