SYSTEM AND METHOD FOR COLLECTING GAS

PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by...

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Main Authors OIWA DOKUHISA, HAYASAKA NOBUO, OUCHI JUNKO, SAKAI ITSUKO, OKUMURA KATSUYA
Format Patent
LanguageEnglish
Korean
Published 07.07.2001
Edition7
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Abstract PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by which efficient collection can be conducted and it is packed into a temporarily stored PFC cylinder.
AbstractList PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by which efficient collection can be conducted and it is packed into a temporarily stored PFC cylinder.
Author HAYASAKA NOBUO
OKUMURA KATSUYA
SAKAI ITSUKO
OIWA DOKUHISA
OUCHI JUNKO
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Snippet PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling...
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG]
CHEMICAL SURFACE TREATMENT
CHEMISTRY
CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEMICONDUCTOR DEVICES
SEPARATION
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
TRANSPORTING
Title SYSTEM AND METHOD FOR COLLECTING GAS
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