SYSTEM AND METHOD FOR COLLECTING GAS
PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
07.07.2001
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Abstract | PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by which efficient collection can be conducted and it is packed into a temporarily stored PFC cylinder. |
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AbstractList | PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by which efficient collection can be conducted and it is packed into a temporarily stored PFC cylinder. |
Author | HAYASAKA NOBUO OKUMURA KATSUYA SAKAI ITSUKO OIWA DOKUHISA OUCHI JUNKO |
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Snippet | PURPOSE: To reduce cost required for collecting PFC and environment load. CONSTITUTION: Gas comprising PFC is separated into PFC and other gas by a cooling... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG] CHEMICAL SURFACE TREATMENT CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORTING |
Title | SYSTEM AND METHOD FOR COLLECTING GAS |
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