Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element

• Main Authors: OSTERRIED KARLFRID, KASPAREK MARKUS, MARIANEK FRANK, EBERT MICHAEL, SORG FRANZ, TRUNZ MICHAEL
• Format: Patent
• Language: English; Korean
• Published: 07.07.2001
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PURPOSE: A device for supporting with little deformation is provided to sufficiently avoid a distortion and prevent modifying from the original appearance. CONSTITUTION: The supporting device includes a holder(1), to which an optical member(2) is at least partially combined through a connecting layer, while the connecting layer is provided between circumferential walls(4, 5) where the holder(1) and the optical member(2) are adjacent to each other. The holder(1) has at least three supporting bases(3) allocated circumferentially, with the optical member(2) supported on the supporting bases(3). The connecting layer is provided at least in a part of the annular gap installed between the circumferential walls(4, 5) where the holder(1) and the optical member(2) are adjacent to each other. 광학소자(2), 특히 반도체 소자용 프로젝션 프린팅 시스템의 렌즈의 단부 플레이트의 저변형 지지장치는 마운트(1)를 구비하며, 광학소자(2)는 마운트(1)와 광학소자의 인접한 원주벽들(4, 5)사이에 위치한 접합층을 통해 적어도 부분적으로 연결되어 있다. 마운트(1)는 원주상에 분포되어 있는 3개 이상의 베어링 피트(3)를 구비하며, 이 베어링 피트에는 광학소자(2)가 놓인다. 접합층은 마운트(1)와 광학소자(2)의 인접한 원주벽들(4, 5) 사이의 환형 간극에서 그의 한개 이상의 섹션에 걸쳐 위치한다.