PRESSURE CONTROL APPARATUS

PURPOSE: A pressure control apparatus is provided to prevent an abnormal process by detecting a deviant operation of a pressure sensor or a pressure sensor controller. CONSTITUTION: The apparatus includes a plurality of pirani gauges(2,10) each of which detects the pressure of a process tube(1), a p...

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Bibliographic Details
Main Authors KIM, JAE DAL, LEE, JU HYEONG
Format Patent
LanguageEnglish
Korean
Published 04.07.2001
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A pressure control apparatus is provided to prevent an abnormal process by detecting a deviant operation of a pressure sensor or a pressure sensor controller. CONSTITUTION: The apparatus includes a plurality of pirani gauges(2,10) each of which detects the pressure of a process tube(1), a plurality of pirani gauge controllers(5,20) each of which generates the voltage according to a value of the pressure detected by each pirani gauge(2,10), a comparator(30) which compares values of the voltage generated respectively from the pirani gauge controllers(5,20), determines whether a faulty functioning occurs, and thereby produces alarm and control signals, and an OR gate(40) which OR-logically calculates interlock signals of the pirani gauge controllers(5,20) and then sends to a sequencer(7) for controlling a main valve.
Bibliography:Application Number: KR19990058546