CLEAN BOX, METHOD AND SYSTEM FOR CLEAN TRANSFER

PURPOSE: A clean box is provided to enhance sealing performance by providing a cover member closing an opening in the lower surface, making an annular groove around the opening defining an enclosed suction space when the cover member is fixed to the box body, and providing an air inlet/outlet units...

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Bibliographic Details
Main Authors MIYAJIMA TOSHIHIKO, OKABE TSUTOMU
Format Patent
LanguageEnglish
Korean
Published 15.06.2001
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TECHNICAL SUBJECTS COVERED BY FORMER USPC
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PURPOSE: A clean box is provided to enhance sealing performance by providing a cover member closing an opening in the lower surface, making an annular groove around the opening defining an enclosed suction space when the cover member is fixed to the box body, and providing an air inlet/outlet units for evacuating/releasing the annular groove externally. CONSTITUTION: A clean box body(41) is a substantially square container where a groove(46) is made at a circumferential part on the upper surface of an open/ close cover(42) touching a first flange part(41a), and an O-ring(27) for sealing the annular groove(46) is fixed entirely to the circumferential part of the open/ close cover(42). The annular groove(46) is evacuated in order to seal the body(41) and the open/close cover(42) by vacuum suction. A sealing force is generated by the pressure difference between the vacuum in the annular groove(46) and the atmospheric pressure. The annular groove(46) is evacuated through an air inlet/outlet, i.e., and a vacuum port(57), made in the side face of the body(41). Since a sealing force higher by a factor of several tens is obtained as compared with a mechanical cover lock, leakage of gas is eliminated.
Bibliography:Application Number: KR20000023050