METHOD FOR MANUFACTURING THERMAL MICRO FLOW RATIO SENSOR

PURPOSE: A manufacturing method for a thermal micro flow ratio sensor is provided to measure temperature of a heater and a working fluid with two Pt resistance thermometers respectively contacting outer parts of the heater and a membrane for carrying out offset of measured values of the sensor and p...

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Bibliographic Details
Main Authors KIM, YUN TAE, JUN, CHI HUN, KIM, SEOK GUN
Format Patent
LanguageEnglish
Korean
Published 15.03.2001
Edition7
Subjects
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
TESTING
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Summary:PURPOSE: A manufacturing method for a thermal micro flow ratio sensor is provided to measure temperature of a heater and a working fluid with two Pt resistance thermometers respectively contacting outer parts of the heater and a membrane for carrying out offset of measured values of the sensor and preventing overheating of the heater, thereby securing the stability of the sensor and precision of the sensor. CONSTITUTION: A manufacturing method for a thermal micro flow ratio sensor includes the steps of forming a sacrificial oxide film channel(209) after forming a vacuum cavity area(202) on a silicon substrate(201), forming a membrane(203) and a cavity(202) by using the sacrificial oxide film channel or an etching hole(210), forming a heater part(204) and upper and lower thermopile parts(205,206) after vacuum-sealing the cavity, forming contact windows in the heater part and the thermopile parts, forming resistance thermometers(207,208) after forming metal wire via the contact windows and evaporating a protection film and pads(218).
Bibliography:Application Number: KR19990035804