PUMP WITH NITROGEN FUZZY SYSTEM

PURPOSE: A pump with nitrogen fuzzy system is provided to reduce maintenance cost by protecting a check valve and an elbow from contaminated exhaust gas and powder, and protecting the check valve from a counter-flow even when a vacuum pump stops its operation. CONSTITUTION: A vacuum pump comprises a...

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Bibliographic Details
Main Authors JANG, HYEON JU, KIM, GEUN HO
Format Patent
LanguageEnglish
Published 15.12.2000
Edition7
Subjects
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Summary:PURPOSE: A pump with nitrogen fuzzy system is provided to reduce maintenance cost by protecting a check valve and an elbow from contaminated exhaust gas and powder, and protecting the check valve from a counter-flow even when a vacuum pump stops its operation. CONSTITUTION: A vacuum pump comprises a pump body, an elbow, and a check valve, where an exhaust gas emitted from the pump body sequentially passes through the elbow and the check valve and is discharged. The vacuum pump further comprises a nitrogen fuzzy pipe(120) connected to the elbow and which ejects N2 gas toward the check valve. The nitrogen fuzzy pipe is connected with a nitrogen fuzzy system(130) for maintaining nitrogen gas supply pressure constant and controlling nitrogen gas supply. The nitrogen fuzzy system includes a flow meter(136) for measuring the amount of nitrogen gas supply, a shutoff valve(134) for shutting off nitrogen gas supply when the pump body stops its operation, and a regulator(132) for maintaining nitrogen gas pressure being supplied during the operation of the pump body constant.
Bibliography:Application Number: KR19990018974