STRUCTURE OF RADIO FREQUENCY SWITCH AND MANUFACTURING METHOD THEREOF

PURPOSE: A method for manufacturing a structure of a radio frequency switch is provided to decrease a driving voltage to a voltage not greater than 1/2.8 as compared with a conventional driving voltage, by having a storage electrode and a plate electrode pulled together, or by having an input signal...

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Bibliographic Details
Main Authors LEE, YEONG JU, KIM, GEUN HO
Format Patent
LanguageEnglish
Published 05.12.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A method for manufacturing a structure of a radio frequency switch is provided to decrease a driving voltage to a voltage not greater than 1/2.8 as compared with a conventional driving voltage, by having a storage electrode and a plate electrode pulled together, or by having an input signal interconnection and first/second output signal interconnection pulled together. CONSTITUTION: A first sacrificial layer is evaporated on a substrate(21) and patterned. A metal material is evaporated on the substrate having the first sacrificial layer to form a storage electrode(23). A second sacrificial layer is formed on the storage electrode and the first sacrificial layer. A metal material is evaporated on the second sacrificial layer and substrate and is patterned to form a plate electrode(25). The first and the second sacrificial layers are eliminated to form an air gap(28).
Bibliography:Application Number: KR19990017567