METHOD FOR INCREASING LIFE TIME OF HOT CATHODE DISCHARGE ION SOURCE

PURPOSE: A method for increasing a life time of a hot cathode discharge ion source is provided to increase a life time of a hot cathode discharge ion source by injecting a co-bLEEd gas containing nitrogen into an ion injection device. CONSTITUTION: A method for increasing a life time of a hot cathod...

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Bibliographic Details
Main Authors JACOBS ROLENS T, MALENPANT JOSEPH L 2, CHENJIONG, FRIER BRIEN S, GRANT JOHN F
Format Patent
LanguageEnglish
Published 25.04.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A method for increasing a life time of a hot cathode discharge ion source is provided to increase a life time of a hot cathode discharge ion source by injecting a co-bLEEd gas containing nitrogen into an ion injection device. CONSTITUTION: A method for increasing a life time of a hot cathode discharge ion source comprises the step of injecting a co-bLEEd gas containing nitrogen into an ion source chamber(10) comprising at least hot cathode discharge ion source and an injection gas. The co-bLEEd of the co-bLEEd gas means a simultaneous injection of the gas containing nitrogen and the injection gas into the ion source chamber of the ion injection device. The co-bLEEding is performed during all process.
Bibliography:Application Number: KR19990039481