COOLING BODY OF TEMPERATURE SENSOR

PURPOSE: A cooling body of a temperature sensor is provided to cool a residual heat of a temperature sensor without using a hand and an air. CONSTITUTION: In an apparatus for cooling a temperature sensor after correcting temperature of the sensor, a plurality of frames(22) are supported by a fix mem...

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Bibliographic Details
Main Author KIM, WAN SU
Format Patent
LanguageEnglish
Korean
Published 15.04.2000
Edition7
Subjects
MEASURING
MEASURING QUANTITY OF HEAT
MEASURING TEMPERATURE
PHYSICS
TESTING
THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Summary:PURPOSE: A cooling body of a temperature sensor is provided to cool a residual heat of a temperature sensor without using a hand and an air. CONSTITUTION: In an apparatus for cooling a temperature sensor after correcting temperature of the sensor, a plurality of frames(22) are supported by a fix member(21) so as to form a body of a cooling body. The plurality of frames(22) surround the temperature sensor(11). A connection ring(23) connects each frames(22). Connection rings are disposed at the frames(22) so as to form a cylindrical shape, and the connection rings are released and closed by a ring fastening device(24). 본 발명은 반도체제조용 전기로의 온도감지기에 대한 것이다. 보다 구체적으로 본 발명은 전기로의 석영관에 대한 온도보정후 온도감지기를 냉각시키는 냉각체에 대한 것이다. 본 발명은, 석영관 내부에 온도감지기를 투입하여 온도보정을 실시한 후 온도감지기를 꺼내어 냉각하는 장치로서, 고정대와, 온도감지기를 감싸는 형태로 고정대에 의해 지지되어 냉각체의 몸체를 이루는 복수의 골격과, 각 골격을 연결시키는 연결링으로 구성된다.
Bibliography:Application Number: KR19980039692