ECO-FRIENDLY POLISHING PAD AND MANUFACTURING METHOD THEREOF
바이오 기반 폴리머 폴리올을 포함하는 폴리우레탄 수지로 제조된 연마패드는 친환경성이 우수하면서 CMP 공정에서 요구되는 경도 및 모듈러스를 가지므로, 반도체 기판의 제조에 이용되어 우수한 성능을 발휘할 수 있다.
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| Main Authors | , , |
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| Format | Patent |
| Language | English Korean |
| Published |
07.06.2024
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| Subjects | |
| Online Access | Get full text |
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| Abstract | 바이오 기반 폴리머 폴리올을 포함하는 폴리우레탄 수지로 제조된 연마패드는 친환경성이 우수하면서 CMP 공정에서 요구되는 경도 및 모듈러스를 가지므로, 반도체 기판의 제조에 이용되어 우수한 성능을 발휘할 수 있다. |
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| AbstractList | 바이오 기반 폴리머 폴리올을 포함하는 폴리우레탄 수지로 제조된 연마패드는 친환경성이 우수하면서 CMP 공정에서 요구되는 경도 및 모듈러스를 가지므로, 반도체 기판의 제조에 이용되어 우수한 성능을 발휘할 수 있다. |
| Author | SEO JANG WON YUN JONG WOOK JI MIN GYEONG |
| Author_xml | – fullname: JI MIN GYEONG – fullname: YUN JONG WOOK – fullname: SEO JANG WON |
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| Discipline | Medicine Chemistry Sciences |
| DocumentTitleAlternate | 친환경 연마패드 및 이의 제조방법 |
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| Notes | Application Number: KR20230109217 |
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| RelatedCompanies | SK ENPULSE CO., LTD |
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| Snippet | 바이오 기반 폴리머 폴리올을 포함하는 폴리우레탄 수지로 제조된 연마패드는 친환경성이 우수하면서 CMP 공정에서 요구되는 경도 및 모듈러스를 가지므로, 반도체 기판의 제조에 이용되어 우수한 성능을 발휘할 수 있다. |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING |
| Title | ECO-FRIENDLY POLISHING PAD AND MANUFACTURING METHOD THEREOF |
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