SEMICONDUCTOR LINE ROBOT CLEANER COMPOSITION

The present invention relates to a semiconductor line robot cleaning composition. The semiconductor line robot cleaning composition according to one embodiment of the present invention comprises ethanol, citric acid, DL-malic acid, a grapefruit seed extract, and purified water, which are included at...

Full description

Saved in:
Bibliographic Details
Main Author KIM, YONG CHEOL
Format Patent
LanguageEnglish
Korean
Published 11.10.2023
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:The present invention relates to a semiconductor line robot cleaning composition. The semiconductor line robot cleaning composition according to one embodiment of the present invention comprises ethanol, citric acid, DL-malic acid, a grapefruit seed extract, and purified water, which are included at a weight ratio of 0.5 to 1.5 parts by weight of ethanol, 0.5 to 1.5 parts by weight of citric acid, 0.1 to 0.3 parts by weight of DL-malic acid, 0.1 to 1 part by weight of a grapefruit seed extract, and 80 to 120 parts by weight of purified water. The semiconductor line robot cleaning composition according to various embodiments of the present invention is applied to a clean room floor or various equipment in a semiconductor factory. The semiconductor line robot cleaning composition is not irritating to the human body, has excellent deodorizing and sterilizing properties, and has excellent cleaning power to remove contaminants. 본 발명은 반도체 라인 로봇 세정제 조성물에 관한 것이다. 본 발명의 기술적 사상의 일 실시예에 따른 반도체 라인 로봇 세정제 조성물은 에탄올, 구연산, DL-사과산, 자몽종자추출물 및 정제수를 포함하고, 상기 에탄올 0.5 내지 1.5 중량부, 구연산 0.5 내지 1.5 중량부, DL-사과산 0.1 내지 0.3 중량부, 자몽종자추출물 0.1 내지 1 중량부 및 정제수 80 내지 120 중량부의 중량 비율로 포함될 수 있다. 상기한 구성에 의해 본 발명의 기술적 사상의 다양한 실시예에 의한 반도체 라인 로봇 세정제 조성물은, 반도체 공장의 클린룸(Clean Room) 바닥 또는 각종 장비에 적용되어 인체에 자극적이지 않을 뿐만 아니라 탈취력과 살균력이 우수하며 오염물을 제거하는 세정력이 우수하다.
Bibliography:Application Number: KR20230050042