response time measuring device for high-speed machine

• Main Authors: YOON SEOK HYUN, KANG JAE HYEOK, JUNG NAM SEOK
• Format: Patent
• Language: English; Korean
• Published: 11.09.2023
• Subjects: CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; HOROLOGY; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; TIME-INTERVAL MEASURING

The present invention generally relates to technology for accurately measuring the response time of high-speed equipment. In particular, the present invention includes a control panel in semiconductor equipment, and a communication device configured to sense command signals and sensor signals transmitted and received between high-speed equipment. By configuring the timer to start by a command signal and stop the timer by a sensor signal, the response time is calculated. The response time of high-speed equipment is accurately measured without being disturbed by the scan time of the entire control program on the control panel. 본 발명은 일반적으로 고속 설비의 응답시간을 정확하게 측정하는 기술에 관한 것이다. 특히, 본 발명은 반도체 장비 등에서 제어반 및 고속 설비로부터 구분되고 이들 간에 송수신되는 명령 시그널과 센서 시그널을 센싱하도록 형성한 통신 장치가 명령 시그널에 의해 타이머를 스타트하고 센서 시그널에 의해 타이머를 스톱하여 응답시간을 연산하도록 구성함으로써 제어반의 제어 프로그램 전체의 스캔타임에 의해 방해받지 않고 고속 설비의 응답시간을 정확하게 측정하는 기술에 관한 것이다.