The start-up method of an ultrapure water production system a starting program and an ultrapure water making system temperature

• Main Author: IIYAMA MASAMITSU
• Format: Patent
• Language: English; Korean
• Published: 14.04.2023
• Subjects: CHEMISTRY; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING; TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE

초순수를 사용 지점에의 공급 수온으로 승온하여 온 초순수를 제조하는 온 초순수 제조 시스템의 기동 방법으로서, 상온 이상이고 또한 공급 수온 이하의 수온 범위 내에서, 초순수를 상온보다 고온으로 승온시킨 승온수와 승온수보다 저온으로 강온시킨 강온수를 온 초순수가 흐르는 온 초순수 배관에 교대로 통수시키는, 온 초순수 제조 시스템의 기동 방법. A method for starting up a hot ultrapure water production system that produces hot ultrapure water by heating ultrapure water to a supply water temperature, for supplied to a point of use, the method involving: alternately passing heated water and cooled water through a hot ultrapure water pipe through which the hot ultrapure water flows, the heated water being obtained by heating the ultrapure water to a temperature higher than room temperature and the cooled water being obtained by cooling the ultrapure water to a temperature lower than the temperature of the heated water in a range of from room temperature to the supply water temperature.