MASK MANUFACTURING METHOD BASED ON MULTI-LAYER LASER IRRDATION
According to the present invention, provided is a mask manufacturing method comprising: a step of setting an area of an opening on a metal sheet; and a step of forming the opening by irradiating a beam on the area of the opening, wherein the step of forming the opening further comprises a step of en...
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Main Authors | , , |
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Format | Patent |
Language | English Korean |
Published |
06.02.2023
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Subjects | |
Online Access | Get full text |
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Summary: | According to the present invention, provided is a mask manufacturing method comprising: a step of setting an area of an opening on a metal sheet; and a step of forming the opening by irradiating a beam on the area of the opening, wherein the step of forming the opening further comprises a step of enabling the beam to be irradiated to a partial area among the area of the opening, and adjusting a taper angle of the opening based on irradiating the beam to at least one other partial area at least partially overlapping the partial area. Therefore, the present invention is capable of adjusting the taper angle of the opening.
본 발명에 따르면, 금속 시트 상에 개구의 영역을 설정하는 단계; 및 상기 개구의 영역 상에 빔을 조사하여 상기 개구를 형성하는 단계를 포함하고, 상기 개구를 형성하는 단계는: 상기 개구의 영역 중 일부 영역에 빔을 조사하고, 상기 일부 영역과 적어도 일부가 중첩하는 적어도 하나의 다른 일부 영역에 빔을 조사하는 것에 기초하여 상기 개구의 테이퍼 각도를 조절하는 단계를 더 포함하는, 마스크 제조 방법이다. |
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Bibliography: | Application Number: KR20220044299 |