Substrate process apparatus using double bellows

• Main Author: MIN SUK KI
• Format: Patent
• Language: English; Korean
• Published: 26.10.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Disclosed is a substrate processing apparatus using double bellows which enables an inner container to accurately perform vertical movement and does not shake a substrate chuck during a vertically moving process. The apparatus comprises: an inner container embedded in a chamber and made of an upper container and a lower container; a substrate chuck installed inside the inner container; a first driving unit disposed in a lower portion of the inner container and vertically moving the substrate chuck; a second driving unit disposed in a lower portion of the inner container and vertically moving the lower container; and a double elastic unit disposed on the outside of a rotation shaft for supporting the substrate chuck and a support shaft for supporting the lower container, wherein the double elastic unit has double bellows for controlling vertical movement of the substrate chuck and the lower container. 내부용기의 상하이동이 정확하게 이루어지고, 상하이동하는 과정에서 기판척의 흔들림이 없는 이중 벨로우즈를 이용한 기판 처리장치를 제시한다. 그 장치는 챔버의 내부에 내장되고 상부용기 및 하부용기로 이루어지는 내부용기와, 내부용기에 내부에 설치된 기판척과, 내부용기의 하부에 배치되고 기판척을 상하로 이동시키는 제1 구동부와, 내부용기의 하부에 배치되고 하부용기를 상하로 이동시키는 제2 구동부 및 기판척을 지지하는 회전축 및 하부용기를 지지하는 지지축의 외부에 배치되고 기판척 및 하부용기의 상하이동을 제어하는 이중 벨로우즈가 구비된 이중 신축부를 포함한다.