SUBSTRATE HAVING NANO STRUCTURE AND METHOD OF THE SAME

• Main Authors: LEE JAE JONG, LIM HYUNG JUN, KWON SOON GEUN, LEE TAEK SU, CHOI HAK JONG
• Format: Patent
• Language: English; Korean
• Published: 27.07.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MANUFACTURE OR TREATMENT THEREOF; MATERIALS THEREFOR; NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS; NANOTECHNOLOGY; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; TRANSPORTING

An embodiment of the present invention provides a nanostructure substrate capable of inducing layer-by-layer growth of a nanostructure and having uniform nano-gaps in a large area, and a method for manufacturing the same. Here, the nanostructure substrate includes a base substrate, a reaction prevention layer, and a nanostructure. The reaction prevention layer is provided on one surface of the base substrate and is made of a first metal material. The nanostructure has a seed layer of a second metal material provided on one surface of the reaction prevention layer to be spaced apart from each other, and a plurality of nanoparticles made of a first metal material and formed by galvanic substitution reaction with the seed layer on one surface of the seed layer. 본 발명의 일실시예는 나노 구조체의 층별 성장을 유도하고, 넓은 면적에서도 균일한 나노 간극을 가질 수 있는 나노 구조체 기판 및 이의 제조방법을 제공한다. 여기서, 나노 구조체 기판은 베이스 기판, 반응 방지층 그리고 나노 구조체를 포함한다. 반응 방지층은 베이스 기판의 일면에 마련되고 제1금속 소재로 형성된다. 나노 구조체는 반응 방지층의 일면에 서로 이격되어 구비되는 제2금속 소재의 시드층과, 제1금속 소재로 형성되고 시드층의 일면에 시드층과 갈바닉 치환 반응되어 마련되는 복수의 나노 입자를 가진다.