X-RAY INSPECTION METHOD FOR OVERLAP PATTERN USING MACHINE LEARNING

• Main Authors: YOON, MYOUNG HUN, PARK, CHIN KUN, KIM, HAN SEOK
• Format: Patent
• Language: English; Korean
• Published: 29.06.2021
• Subjects: CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The present invention discloses an X-ray inspection method of an overlap pattern. According to an X-ray inspection performing technology, accuracy can be improved by actively responding to image changes that occur in each inspection environment for a specific type of product, and detection of defects such as voids can be effectively performed. The X-ray inspection method of an overlap pattern creates a basic image for the inspection target, and extracts one or more part regions through machine learning from a part composed of a plurality of parts overlapping at least in part. 본 발명은 특정 유형의 제품에 대하여 검사 환경별로 발생되는 이미지의 변화에 능동적으로 대응하여 정확성을 향상할 수 있고 보이드와 같은 불량의 검출이 효율적으로 이루어질 수 있도록 하는 엑스선 검사 수행기술에 관한 것으로서, 검사대상에 대한 기본이미지를 생성하며 최소한 일부분이 오버랩된 복수의 파트로 구성된 부분으로부터 머신러닝을 통하여 하나 이상의 파트영역을 추출하는 오버랩 패턴의 엑스선 검사 방법을 제시한다.