optical wave guide based on silicon-lithium niobate photonics and ultra-compact optical phase modulator using the same

• Main Authors: LEE, SANG SIN, LEE WOO BIN
• Format: Patent
• Language: English; Korean
• Published: 05.06.2020
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

Provided is an ultra-fine optical phase modulator based on silicon-lithium niobate photonics. The ultra-fine optical phase modulator comprises: a silicon substrate layer on which a second electrode is formed; an insulating silica layer formed on an upper part of the silicon substrate layer; a lithiu...