3 3 DIMENSIONAL SHAPE DETECTION APPARATUS AND METHOD

According to the present invention, a position of a circuit component, which is a region of interest in a low-resolution pattern, is identified, the region of interest can be moved by an optical and a mechanical method for precise measurement, and an optimal high-resolution pattern for each region o...

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Bibliographic Details
Main Authors NAM JUNG HYUN, AHN HAN JOON
Format Patent
LanguageEnglish
Korean
Published 14.10.2019
Subjects
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
TESTING
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Summary:According to the present invention, a position of a circuit component, which is a region of interest in a low-resolution pattern, is identified, the region of interest can be moved by an optical and a mechanical method for precise measurement, and an optimal high-resolution pattern for each region of interest can be selected and measured, thereby increasing a processing speed and making a precise depth measurement. 본 발명은 저해상도 패턴으로 관심 영역인 회로 부품의 위치를 확인하고 정밀한 측정을 위해 관심 영역을 광학적, 기계적 방법으로 이동시키고 관심 영역별 최적 고해상도 패턴을 선정하여 측정할 수 있어 처리 속도를 높이고 정밀한 깊이 측정을 할 수 있다.
Bibliography:Application Number: KR20180037058