APPARATUS FOR TRANSFERRING SUBSTRATE DRIVED BY MAGNETIC FORCE

The present invention relates to a substrate transfer apparatus driven by magnetic force, having a simple structure and capable of reducing a cost through reduction of the number of components. The substrate transfer apparatus driven by magnetic force includes: a tray having a plurality of magnetic...

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Bibliographic Details
Main Author KIM, HYEONG YONG
Format Patent
LanguageEnglish
Korean
Published 24.05.2019
Subjects
CLEANING
CLEANING IN GENERAL
CONVEYING
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PREVENTION OF FOULING IN GENERAL
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:The present invention relates to a substrate transfer apparatus driven by magnetic force, having a simple structure and capable of reducing a cost through reduction of the number of components. The substrate transfer apparatus driven by magnetic force includes: a tray having a plurality of magnetic force moving units on a lower surface; a guide rail providing a path through which the tray is transferred; and a cleaning unit provided on a side surface of the tray and removing particles capable of occurring during transfer of the tray. 본 발명은 구조가 간단하며 부품수 감소를 통한 코스트 절감이 가능한 자력 구동식 기판 이송 장치에 관한 것으로, 하부면에 복수개로 이루어지는 자력 이동부를 구비하는 트레이; 상기 트레이가 이송되는 경로를 제공하는 가이드 레일; 및 상기 트레이의 측면에 구비되어 상기 트레이의 이송 중에 발생할 수 있는 파티클을 제거하기 위한 클리닝유닛을 포함하여 구성될 수 있다.
Bibliography:Application Number: KR20180145886