DEPOSITION APPARATUS FOR GLASS

• Main Authors: KIM, A REUM, KIM, YOUNG DO, CHOI, BYOUNG HO
• Format: Patent
• Language: English; Korean
• Published: 19.02.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Disclosed is a substrate deposition apparatus which can prevent a quality decrease problem or a yield decrease problem. According to an embodiment of the present invention, the substrate deposition apparatus comprises: a mask frame provided in a chamber in which a deposition process is progressed, and supporting a mask sheet being in contact with a substrate during a bonding process; and a touch plate arranged in an upper area of the mask frame, and aligning the substrate through pressurization so that the substrate is in contact with the mask sheet while maintaining a noncontact state with the mask frame during the bonding process. 기판 증착장치가 개시된다. 본 발명의 일 실시예에 따른 기판 증착장치는, 증착공정이 진행되는 챔버에 마련되며, 합착공정 시 기판과 접촉(contact)되는 마스크 시트(mask sheet)를 지지하는 마스크 프레임(mask frame); 및 마스크 프레임의 상부 영역에 배치되며, 합착공정 시 마스크 프레임과는 비접촉(noncontact) 상태를 유지하면서 기판이 마스크 시트에 접촉되도록 기판을 가압 얼라인(align)시키는 터치 플레이트(touch plate)를 포함한다.