MANUFACTURING METHOD OF CRYTALLINE SOLAR CELL IMPROVED ADHESION FORCE BETWEEN SILICON AND PLATING ELECTRODE

• Main Authors: KIM, PAN SOO, LEE, DUK HAENG, JEONG, KYUNG TAEK, KIM, JOO YOUNG, JUNG, WOON SUK
• Format: Patent
• Language: English; Korean
• Published: 03.08.2016
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The present invention relates to a method of manufacturing a crystalline solar cell in which adhesion between a silicon substrate and a plating electrode is improved through an electroless plating or electroplating scheme. A method of manufacturing a crystalline solar cell includes the steps of: texturing a light receiving part of a crystalline silicon substrate to form a concave portion; doping the silicon substrate processed through the texturing step to form a P/N junction; forming an antireflection film on the light receiving part of the silicon substrate processed through the doping step; treating a part of the antireflection film with laser to form an electrode on the light receiving part of the silicon substrate; forming a nano rod pore on the light receiving part of the silicon substrate processed through the laser treating step; and plating the light receiving part of the silicon substrate formed with the nano rod pore to form a plating electrode. 본 발명은 결정질 실리콘 기판의 수광부에 요철을 형성하는 텍스처링(texturing)단계; 상기 텍스처링단계를 거친 실리콘 기판을 p/n 접합하는 도핑(doping)단계; 상기 도핑단계를 거친 실리콘 기판의 수광부에 반사방지막을 형성하는 반사방지막형성단계; 상기 실리콘 기판의 수광부에 전극을 형성하기위하여 상기 반사방지막의 일부를 레이저로 가공하는 레이저가공단계; 상기 레이저가공단계를 거친 실리콘 기판의 수광부에 나노로드포어(Nano Rod Pore)를 형성하는 나노로드포어형성단계; 및 상기 나노로드포어가 형성된 실리콘 기판의 수광부를 도금하여 도금전극을 형성하는 도금단계를 포함하는 것을 특징으로 하는, 실리콘 기판과 도금전극간의 밀착력이 향상된 결정질 태양전지 제조방법을 제공한다.