MANUFACTURING METHOD OF CRYTALLINE SOLAR CELL IMPROVED ADHESION FORCE BETWEEN SILICON AND PLATING ELECTRODE
The present invention relates to a method of manufacturing a crystalline solar cell in which adhesion between a silicon substrate and a plating electrode is improved through an electroless plating or electroplating scheme. A method of manufacturing a crystalline solar cell includes the steps of: tex...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
03.08.2016
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to a method of manufacturing a crystalline solar cell in which adhesion between a silicon substrate and a plating electrode is improved through an electroless plating or electroplating scheme. A method of manufacturing a crystalline solar cell includes the steps of: texturing a light receiving part of a crystalline silicon substrate to form a concave portion; doping the silicon substrate processed through the texturing step to form a P/N junction; forming an antireflection film on the light receiving part of the silicon substrate processed through the doping step; treating a part of the antireflection film with laser to form an electrode on the light receiving part of the silicon substrate; forming a nano rod pore on the light receiving part of the silicon substrate processed through the laser treating step; and plating the light receiving part of the silicon substrate formed with the nano rod pore to form a plating electrode.
본 발명은 결정질 실리콘 기판의 수광부에 요철을 형성하는 텍스처링(texturing)단계; 상기 텍스처링단계를 거친 실리콘 기판을 p/n 접합하는 도핑(doping)단계; 상기 도핑단계를 거친 실리콘 기판의 수광부에 반사방지막을 형성하는 반사방지막형성단계; 상기 실리콘 기판의 수광부에 전극을 형성하기위하여 상기 반사방지막의 일부를 레이저로 가공하는 레이저가공단계; 상기 레이저가공단계를 거친 실리콘 기판의 수광부에 나노로드포어(Nano Rod Pore)를 형성하는 나노로드포어형성단계; 및 상기 나노로드포어가 형성된 실리콘 기판의 수광부를 도금하여 도금전극을 형성하는 도금단계를 포함하는 것을 특징으로 하는, 실리콘 기판과 도금전극간의 밀착력이 향상된 결정질 태양전지 제조방법을 제공한다. |
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Bibliography: | Application Number: KR20150042165 |